Equipment
High-precision Coordinate Measuring MachineUA3P
Data
High-precision Coordinate Measuring MachineHigh-precision Coordinate Measuring Machine
| Name | UA3P（Panasonic） |
|---|---|
| Measurement range | X:100 x Y:100 x Z:35mm |
Atomic force probe enables scanning measurement with minimal damage to the workpiece surface. In addition to flat surfaces and spherical surfaces, rotationally symmetric aspheric surfaces and rotationally asymmetric aspheric surfaces can also be measured.
Compared to non-contact measurement, lenses with anti-reflection coating can also be measured, and tilts of up to 60° can be measured. Position detection on the X, Y, and Z axes uses laser interferometry using a high-precision reference mirror to capture data to cancel the effects of stage straightness, making highly accurate measurements possible. Its reliability is highly evaluated all over the world.